Pyrolytic graphite coating PYROGRAPH™

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PYROGRAPH™ is a product created by coating the surface of highly purified isotropic graphite with a fine layer of pyrolytic carbon by means of a proprietary Toyo Tanso Chemical Vapor Deposition (CVD) process.

Features

the pyrolytic carbon layer is extremely fine
ultrapure
the layer coating ensures extremely low gas permeability
excellent corrosion resistance against gas
excellent oxidation resistance at low temperatures
excellent heat resistance
prevents the parting and scattering of graphite particles, and the emission of gas and impurities from the graphite substrate

Application・Products

Single crystal silicon manufacturing equipment
Tube for atomic absorption spectroscopy
OLED manufacturing equipment

Properties/Test Data

Impurity Analysis Example

* Measurement method: Glow Discharge Mass Spectrometry
* The figures above are measurement examples, and are not to be guaranteed.

General Physical Properties

* The temperature range for the coefficient of thermal expansion is RT to 1,000°C.
* The figures above are extracted from other publications, and are not to be guaranteed.

Gas Permeability

Source: Pg. 137 of “Introduction to Carbon Materials” from the Carbon Society of Japan