TaC-coated Graphite EVEREDKOTE™-C
EVEREDKOTE™-C is a high-purity isotropic graphite substrate covered with dense tantalum carbide via CVD.
EVEREDKOTE™-C is a material created by coating the surface of a highly purified graphite substrate with a fine layer of TaC (tantalum carbide) by means of a proprietary Toyo Tanso Chemical Vapor Deposition (CVD) process.
Feature
EVEREDKOTE™-C is a material created by coating the surface of a highly purified graphite substrate with a fine layer of TaC
(tantalum carbide) by means of a proprietary Toyo Tanso Chemical Vapor Deposition (CVD) process.
Feature
Features
- Excellent heat resistance.
- Prevents the separation and scattering of graphite powder, as well as the release of gases and impurities from the graphite substrate.
- Excellent resistance to reactions with etching gases.
- Improved adhesion over conventional materials
Application
- Components for single crystal SiC growth
- Components for MOCVD
- High-temperature components
Properties/Test Data
■General Physical Properties
| Item | Tantalum Carbide |
|---|---|
| Bulk Density | 14.5Mg/㎥ |
| Melting Point | 3985℃ |
| Hardness | 1550HK |
| Electrical Resistivity | 0.15μΩ・m |
| Thermal Conductivity | 9 to 22 (W/m·K) |
| Coefficient of Thermal Expansion | 7.1（106/K） |
* The above numerical values are those taken from the below source and are not guaranteed values.
Source: H. Holleck: Material selection for hard coatings, J. Vac. Sci. Technol. A, Vol.4, No.6, Nov/Dec 1986
■Reactivity with Various Substances
| Reactive Substance | 1200℃×5h | 1600℃×5h |
|---|---|---|
| Hydrogen Chloride | ◎ | ◎ |
| Ammonia | ◎ | ◎ |
| Hydrogen | ◎ | ◎ |
| Oxygen | × (600°C or more) | |
※◎:No reaction ×;Significant reaction
Hydrogen chloride reaction test: 20 Torr, HCl/H2 = 0.30/2.70 L/min (10%)
Ammonia reaction test: 20 Torr, NH3/H2 = 0.5/2.0 L/min (20%)
Hydrogen reaction test: 20 Torr, H2 3.0 L/min
Oxygen: Cracking and embrittlement of coating in low concentration oxidized atmosphere.
EVEREDKOTE™-C Exterior and SEM cross-section image
Reactivity with ammonium
Emissivity
Impurity analysis example mass ppm
| Element | Content |
|---|---|
| B | < 0.01 |
| N | < 5 |
| Na | < 0.01 |
| Mg | < 0.05 |
| Al | < 0.01 |
| Si | 0.14 |
| P | <0.3 |
| S | <0.02 |
| Cl | -0.3wt% |
| Ca | < 0.05 |
| Ti | < 0.005 |
| V | < 0.005 |
| Cr | < 0.1 |
| Mn | < 0.005 |
| Fe | 0.42 |
| Co | < 0.01 |
| Ni | 0.06 |
| Cu | <0.05 |
| Zn | < 0.05 |
| As | < 10 |
| Nb | 1.1 |
| Mo | 1.6 |
*1 < :Detection limit
*2 The figures above are measurement examples and are not to be guaranteed.
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